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Adaptive iterative extended state observer-based data-driven iterative learning model predictive control for semiconductor silicon single crystal batch process. (English) Zbl 1508.93099

Summary: Aiming at the problems of unstable batch control of key crystal quality parameters and susceptibility to batch-to-batch non-repetitive disturbances during repeated operation of single crystal furnaces, this paper proposes a data-driven iterative learning model predictive control method based on an adaptive iterative extended state observer (IESO) for designing melt temperature and crystal diameter learning controllers with disturbance suppression. By applying dynamic linearization techniques and model predictive control strategies along the iterative axis, an ILMPC scheme with disturbance compensation terms using only input and output data of the system is designed. Among them, adaptive IESO is used to estimate the disturbance compensation terms. Then, the theoretical analysis shows that the tracking error of the ILMPC scheme can converge to a bounded range as the number of iterations increases. The experimental results verify the effectiveness of the proposed control method, which not only ensures that the control system has learning ability, but also achieves stable and accurate control of crystal quality parameters.

MSC:

93B45 Model predictive control
93B47 Iterative learning control
93C40 Adaptive control/observation systems
93B53 Observers
Full Text: DOI

References:

[1] Fisher, G.; Seacrist, M. R.; Standley, R. W., Silicon crystal growth and wafer technologies, Proc. IEEE, 100, 1454-1474 (2012)
[2] Ren, J.; Liu, D.; Wan, Y., Modeling and application of Czochralski silicon single crystal growth process using hybrid model of data-driven and mechanism-based methodologies, J. Process Control, 104, 74-85 (2021)
[3] Kato, S.; Kim, S.; Kano, M.; Fujiwara, T.; Mizuta, M., Gray-box modeling of 300mm diameter Czochralski single-crystal Si production process, J. Cryst. Growth, 553, Article 125929 pp. (2021)
[4] Rahmanpour, P.; Sælid, S.; Hovd, M., Run-to-run control of the Czochralski process, Comput. Chem. Eng., 104, 353-365 (2017)
[5] Ren, J.; Liu, D.; Wan, Y., Model-Free adaptive iterative learning control method for the Czochralski silicon monocrystalline batch process, IEEE Trans. Semicond. Manuf., 34, 3, 398-407 (2021)
[6] Liu, D.; Zhang, N.; Jiang, L.; Zhao, X.; Duan, W., Nonlinear generalized predictive control of the crystal diameter in CZ-Si crystal growth process based on stacked sparse autoencoder, IEEE Trans. Control Syst. Technol., 28, 3, 1132-1139 (2020)
[7] Kato, S.; Kim, S.; Mizuta, M.; Oshima, M.; Kano, M., Gray-box model-based predictive control of Czochralski process, J. Cryst. Growth, 573, Article 126299 pp. (2021)
[8] Ren, J.; Liu, D.; Wan, Y., Hybrid integrated modeling based adaptive nonlinear predictive control of silicon single crystal diameter, Acta Autom. Sin., 46, 5, 1004-1016 (2020)
[9] Neubert, M.; Winkler, J., Nonlinear model-based control of the Czochralski process IV: feedforward control and its interpretation from the crystal grower׳s view, J. Cryst. Growth, 404, 210-222 (2014)
[10] Rahmanpour, P.; Sælid, S.; Hovd, M.; Grønning, O.; Jomaa, M., Nonlinear model predictive control of the Czochralski process, IFAC PapersOnLine, 49, 20, 120-125 (2016)
[11] Bukhari, H. Z.; Aftab, M. F.; Winkler, J.; Hovd, M., Adaptive nonlinear control of the Czochralski process via integration of second order sliding mode and iterative learning control, (Proceedings of the 11th Asian Control Conference (ASCC). Proceedings of the 11th Asian Control Conference (ASCC), Australia (2017)), 2732-2737
[12] Wan, Y.; Liu, D.; Ren, J.; Liu, C.; Sun, J., Model-free sliding mode iterative learning control for Cz silicon single crystal diameter, (Proceedings of the 39th Chinese Control Conference (CCC). Proceedings of the 39th Chinese Control Conference (CCC), Shenyang, China (2020)), 5713-5717
[13] Hou, Z.; Chi, R.; Gao, H., An overview of dynamic-linearizationbased data-driven control and applications, IEEE Trans. Ind. Electron., 64, 5, 4076-4090 (2017)
[14] Hou, Z.; Zhu, Y., Controller-dynamic-linearization-based model free adaptive control for discrete-time nonlinear systems, IEEE Trans. Ind. Inform., 9, 4, 2301-2309 (2013)
[15] Bu, X.; Hou, Z.; Yu, Q.; Yang, Y., Quantized data driven iterative learning control for a class of nonlinear systems with sensor saturation, IEEE Trans. Syst. Man Cybern. Syst., 50, 12, 5119-5129 (2020)
[16] Bu, X.; Yu, W.; Yu, Q.; Hou, Z.; Yang, J., Event-triggered model-free adaptive iterative learning control for a class of nonlinear systems over fading channels, IEEE Trans. Cybern., 52, 9, 9597-9608 (2022)
[17] Lee, K.; Lee, D.; Park, J.; Lee, M., MPC based feedforward trajectory for pulling speed tracking control in the commercial Czochralski crystallization process, Int. J. Control Autom. Syst., 3, 2, 252-257 (2005)
[18] Bristow, D. A.; Tharayil, M.; Alleyne, A. G., A survey of iterative learning control, IEEE Control Syst. Mag., 26, 3, 96-114 (2006)
[19] Yu, Q.; Hou, Z., Data-driven predictive iterative learning control for a class of multiple-input and multiple-output nonlinear systems, Trans. Inst. Meas. Control, 38, 3, 266-281 (2016)
[20] Yu, Q.; Hou, Z.; Bu, X.; Yu, Q., RBFNN-based data-driven predictive iterative learning control for nonaffine nonlinear systems, IEEE Trans. Neural Netw. Learn. Syst., 31, 4, 1170-1182 (2020)
[21] Bu, X.; Yu, Q.; Hou, Z.; Qian, W., Model free adaptive iterative learning consensus tracking control for a class of nonlinear multiagent systems, IEEE Trans. Syst. Man Cybern. Syst., 49, 4, 677-686 (2019)
[22] Hui, Y.; Chi, R.; Huang, B.; Hou, Z., Extended state observer-based data-driven iterative learning control for permanent magnet linear motor with initial shifts and disturbances, IEEE Trans. Syst. Man Cybern. Syst., 51, 3, 1881-1891 (2021)
[23] Chi, R.; Hui, Y.; Zhang, S.; Huang, B.; Hou, Z., Discrete-time extended state observer-based model-free adaptive control via local dynamic linearization, IEEE Trans. Ind. Electron., 67, 10, 8691-8701 (2020)
[24] Chi, R.; Hui, Y.; Huang, B.; Hou, Z., Active disturbance rejection control for nonaffined globally lipschitz nonlinear discrete-time systems, IEEE Trans. Autom. Control, 66, 12, 5955-5967 (2021) · Zbl 1536.93513
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