28 nm process
Semiconductor device fabrication |
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MOSFET scaling (process nodes) |
Future
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The 28 nm lithography process is a half-node semiconductor manufacturing process based on a die shrink of the 32 nm lithography process.[1] It appeared in production in 2010.[2]
Taiwan Semiconductor Manufacturing Company has offered 28 nm production using high-K metal gate process technology.[3]
GlobalFoundries offers a 28nm foundry process called the 28SLPe (28nm Super Low Power) foundry process, which uses high-K metal gate technology.[4]
Design
28nm requires twice the number of design rules for ensuring reliability in manufacturing as 80nm.[5]
Shipped devices
AMD's Radeon HD 7970 uses a graphics processing unit manufactured using a 28nm process.[6]
Some models of the PS3 use a RSX 'Reality Synthesizer' chip manufactured using a 28nm process.[7]
FPGAs produced with 28 nm process technology include models of the Xilinx Artix 7 FPGAs and Altera Cyclone V FPGAs.[8]
References
- ^ Torres, J. Andres; Otto, Oberdan; Pikus, Fedor G. (2009-10-01). Zurbrick, Larry S.; Montgomery, M. Warren (eds.). Challenges for the 28nm half node: Is the optical shrink dead? (PDF). Society of Photographic Instrumentation Engineers. pp. 74882A. doi:10.1117/12.831047.
- ^ "A Review of TSMC 28 nm Process Technology | TechInsights". www.techinsights.com. Retrieved 2024-03-01.
- ^ Clarke, Peter (2009-08-24). "TSMC splits 28-nm high-k metal gate process into two versions". EE Times.
- ^ "GlobalFoundries 130, 55, 45, 40, 28, 22, 12nm Prototyping and Volume Production" (PDF).
- ^ Balasinski, Artur (2014). Design for manufacturability: from 1D to 4D for 90-22nm technology nodes. New York, New York: Springer. p. 124. ISBN 978-1-4614-1761-3.
- ^ Smith, Ryan. "AMD Radeon HD 7970 Review: 28nm And Graphics Core Next, Together As One". www.anandtech.com. Retrieved 2024-03-01.
- ^ "NVIDIA RSX-28nm".
- ^ Homulle, Harald; Charbon, Edoardo (2017-12-13). "Performance characterization of Altera and Xilinx 28 nm FPGAs at cryogenic temperatures". 2017 International Conference on Field Programmable Technology (ICFPT). IEEE: 25–31. doi:10.1109/FPT.2017.8280117. ISBN 978-1-5386-2656-6.